Towards NEMS Fluid Sensors Based on Suspended Nanomaterials
نویسندگان
چکیده
منابع مشابه
Towards NEMS Fluid Sensors Based on Suspended Nanomaterials
Nanoelectromechanical systems (NEMS) based on nanomaterials, especially NEMS resonators made of suspended nanowires, nanotubes or nanosheets have emerged as promising devices for many sensing applications. However, operation of such NEMS resonators in liquids is usually difficult due to strong viscous damping. Here we present our progress in developing NEMS devices based on suspended nanomateri...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 2009
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-1222-dd05-31